JPS6227346U - - Google Patents
Info
- Publication number
- JPS6227346U JPS6227346U JP1985117931U JP11793185U JPS6227346U JP S6227346 U JPS6227346 U JP S6227346U JP 1985117931 U JP1985117931 U JP 1985117931U JP 11793185 U JP11793185 U JP 11793185U JP S6227346 U JPS6227346 U JP S6227346U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- attached
- pellicle frame
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117931U JPS6320989Y2 (en]) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117931U JPS6320989Y2 (en]) | 1985-07-31 | 1985-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6227346U true JPS6227346U (en]) | 1987-02-19 |
| JPS6320989Y2 JPS6320989Y2 (en]) | 1988-06-10 |
Family
ID=31003908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985117931U Expired JPS6320989Y2 (en]) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320989Y2 (en]) |
-
1985
- 1985-07-31 JP JP1985117931U patent/JPS6320989Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320989Y2 (en]) | 1988-06-10 |